高承载直驱直线平移台-400mm/600mm/100kg

这款高承载直驱直线平移台是高精度线性直驱平移台Direct Drive Linear Translation Stage,采用光学编码器和3相无铁线性无刷伺服电机技术,为用户带来零反冲高精度平移运动,具有独特的平移精度高,重复精度高和摩擦低的特点。
高承载直驱直线平移台采用线性非接触式光学编码器作为反馈系统,使得位置控制高达亚纳米级分辨率。
高承载直驱直线平移台采用自然老化铝合金确保了平移台高温稳定性和轻巧性,以及*良的长周期运动,导轨系统不会发生漂移。
高承载直驱直线平移台可以用于洁净空间环境或真空度10^-3Torr的真空环境,也可根据用户要求提供高真空直驱平移台。
高承载直驱直线平移台可以轻松地直接连接到光学平台上,可直接安装搭建成电动XY二维平移台,无需使用任何连接板。
高承载直驱直线平移台还可以安装到花岗岩龙门架或高精度平台上实现高精度平移定位。

图1：高承载直驱直线平移台实物图
高承载直驱直线平移台特点
直接驱动无反冲backlash系统
+/-0.5um双向重复定位精度
高分辨率非接触式光学编码器
高精度线性导向和运载系统
超长使用寿命
方便集成到各种平台或光学机械系统中
XY二维位移台的正交性高达<=5arcsec
非常适合激光打标,激光钻孔,激光划线,激光雕刻等应用
具有灰尘防护能力
高承载直驱直线平移台规格

Model	8MTL220-400-LEn1	8MTL220-600-LEn1
Kinematics & Feedback information
Travel Range, mm	400	600
Encoder Type	Optical
Encoder Model	LEN1
Encoder Resolution	Any of the range: 25 nm to 5 µm (on demand)
Encoder Interface	Differential RS422
Internal Multiplier	YES
Multiplication factor 1)	4-200 (on demand)
Encoder Grating Period, µm	20
Reference Mark (Index)	Yes
Absolute Accuracy 2)
Before Calibration, µm	±10	±12
After Calibration, µm	±1	±1
Uni-Directional Repeatability, µm	N/A
Bi-Directional Repeatability (peak to peak) 2), µm	±0.5
Bi-Directional Repeatability (RMS) 2), µm	±0.26
Pitch 3), µrad / arcsec	±30 / ±6.20
Yaw 3), µrad / arcsec	±30 / ±6.20
Roll, µrad / arcsec	N/A
Maximum Velocity (with load 4kg) 4), mm/s	<2000
Maximum Acceleration (with load 4kg) 5), mm/s2	<20000
Limits Switches Type (Safety)	Optical (Optrons)
Limit Switch Polarity (Safety)	Pushed is closed
Limit Switch Voltage, V	5…24
Load, Guiding & Transmission Information
Design Type	Linear Motor Stage
Linear Motor Model	LM4
Linear Motor Design Type	Ironless BLDC motor
Maximum Bus Voltage, VDC	>300
Load Capacity (Centrally Placed) 6)
Horizontal, kg	100
Vertical, kg	N/A
Moving Mass 7), kg	9.5
Guiding System	Recirculating linear rails and carriages units with caged balls
Material & Environment Conditions
Housing Material	Aluminum Alloy
Housing Coating (Finish)	Black Anodizing
Environment Pressure	Normal Atmosphere
Operating Temperature, °C	20±2
Control, Communication and Cabling
Recommended Controllers 8)	ACS Products Line or 8SMC5-USB series
Recommended Drivers 8)	ACS Products Line or 8SMC5-USB series
Recommended Power Supply 9)	2 phase / 3 phase source
Recommended Communication Interface 12)	EtherCAT / RS232 / USB / TCP-IP
Cable Length, m	2 (other by request)
Differential Outputs 10)	On request
Accessories Information
Base Plate for Mechanical Interface	Not required
XY Stack	Directly
Z Configuration	Not available (choose from other Standa stages series)
Additional Details
Dimensions of Moving Platform (W x L), mm	225 x 225
Overall Linear Stage Dimensions (W x L x H), mm	780 x 297.5 x 100	980 x 297.5 x 100
Measurement System	Metric
Orthogonality (XY Configuration) 11), µrad / arcsec	24 / 5
Protection Level	From solid particles and spray
RoHS	Compliant
Weight, kg	37	46

1)  默认为x4转PPR-脉冲数/每转，模拟SIN/COS编码器接口
2)绝对精度和双向重复定位精度采用Zygo ZMI 501 Michelson laser interferometer测量计算
3) Pitch & Yaw 采用 11D-ALI-COL 电子自相关仪器测试,电子自相关仪11D-ALI-COL分辨率1µrad. 环境误差1µrad.
4) ***大速度由编码器限制和驱动器CUT-OF频率以及导向系统限制.
5)***大加速度由驱动器“Peak Current, Motors` Peak Current and External Load (inertia)决定.
6)负载能力由导向系统决定.
7) 运动质量是系统常数m₀,通常是没有负载时的惯性。
8) 推荐的控制器和驱动器有助于发挥电动平移台的性能.
9) 推荐的电源是根据用户的占空比和负载来选择.
10) 差分输出接口,可提供主动或被动LCMv2接口.
11) 可组成正交性能**的XY二维电动位移台系统.
12) 标量控制可采用USB / TCP-IP / RS-232通讯接口,矢量控制建议采用EtherCAT接口。
13) 平移台包括特殊封盖,可用于灰尘严重或湿度较大的环境