| 型号 | SLC-2430 | SLC-2445 | SLC-2460 | SLC-2475 | SLC-2490 | SLC-24105 | SLC-24120 | SLC-24150 | SLC-24180 |
| 分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
| 负载 | 20N(2kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) |
| 适合真空度 | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar |
| 行程范围 |
16mm （±6mm) |
29mm （±14.5mm) |
35mm （±17.5mm) |
49mm （± 24.5mm) |
63mm （± 31.5mm) |
69mm （± 34.5mm) |
83mm （± 41.5mm) |
± 51.5 (103) mm | ± 61.5 (123) mm |
| 步进1 | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm |
| 扫描范围 | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um |
| 扫描分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
| 速度 | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s |
| ***大频率 | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz |
| 阻尼力Fb | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N |
| ***大正向力Fn | 20N | 30N | 30N | 30N | 30N | 30N | 30N | 30N | 30N |
| ***大升力Fl | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N |
| 尺寸 |
30x24x10.5 mm^3 |
45x24x10.5 mm^3 |
60x24x10.5 mm^3 |
75x24x10.5 mm^3 |
90x24x10.5 mm3 |
105x24x10.5x mm3 |
120x24x10.5 mm^3 |
150x24x10.5 mm^3 |
180x24x10.5 mm^3 |
| 重量 | 36g | 54g | 72g | 90g | 108g | 126g | 144g | 180g | 216g |
| pitch俯仰力矩Mp | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
| yaw偏航力矩My | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
| roll扭转力矩Mr | 1.5Nm | 2.6Nm | 3.2Nm | 3.9Nm | 4.8Nm | 5.8Nm | 6.1Nm | 6.1Nm | 6.1Nm |
|
Closed-Loop-S 传感器分辨率 |
1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm |
|
Closed-Loop-S 重复精度2 |
+/-30nm | +/-45nm | +/-60nm | +/-75nm | +/-90nm | +/-105nm | +/-120nm | +/-150nm | +/-180nm |
|
Closed-Loop-L 传感器分辨率 |
4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm |
|
Closed-Loop-L 闭环分辨率 |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
±500nm(H)CU 4nm MCS |
|
Closed-Loop-L 重复精度 |
±1um(H)CU ±60nm MCS |
±1um(H)CU ±90nm MCS |
±1um(H)CU ±120nm MCS |
±1um(H)CU ±150nm MCS |
±1um(H)CU ±180nm MCS |
±1um(H)CU ±210nm MCS |
±1um(H)CU ±240nm MCS |
±1um(H)CU ±300nm MCS |
±1um(H)CU ±360nm MCS |
