型号 | SLL12 | SLLA42 | SLLV42 |
分辨率 | <1nm | <1nm | <1nm |
负载 | 30N(3kg) | 30N(3kg) | 30N(3kg) |
适合真空度 | 10-11 mbar | 10-11 mbar | 10-11 mbar |
行程范围 | 70~475mm | 70~1480mm | 70~1480mm |
步进1 | 1-1500nm | 1-1500nm | 1-1500nm |
扫描范围 | >1.5um | >3um | >3um |
扫描分辨率 | <1nm | <1nm | <1nm |
速度 | >20mm/s | >20mm/s | >20mm/s |
***大频率 | 18.5KHz | 18.5KHz | 18.5KHz |
阻尼力Fb | >3N | >5N | >5N |
***大正向力Fn | 30N | 30N | 30N |
***大升力Fl | >1N | >1.5N | >1.5N |
尺寸 | 33.8 x 27 x 13 mm3 | 54 x 60 x 16 mm3 | 54.8 x 60 x 16 mm3 |
重量 | 44g | 148g | 148g |
钢轨重 | 59 g / 100 mm | 286 g / 100 mm | 286 g / 100 mm |
pitch俯仰力矩Mp | 6Nm | 25Nm | 25Nm |
yaw偏航力矩My | 6Nm | 25Nm | 25Nm |
roll扭转力矩Mr | 11Nm | 90Nm | 90Nm |
Closed-Loop-S 传感器分辨率 |
1nm | 1nm | 1nm |
Closed-Loop-S 重复精度 |
± 70 ~450 nm 2 | ± 70 ~450 nm 2 | ± 70 ~450 nm 2 |