|
型号 |
波长范围 |
测量参数 |
测量薄膜厚度范围 |
测量点大小 |
可选项 |
|
MSP100 |
250 to 1000 nm |
D - Thickness; R - Reflection T - Transmission N - Refractive Index; K - Extinction Coefficients Geometry of features |
Up to 25um |
Configuration 1: 8µm /40µm /100µm
Or
Configuration 2: 5µm /25µm /50µm
|
Transmission Motorized Stage Motorized Z Focus Heating/Cooling Stage Special Sample Holders Fluorescence Attachment Other spot sizes Polarizing optics Thickness standards |
|
MSP300 |
400 to 1000 nm |
20nm to 50um |
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|
MSP400 |
1000 to 1700 nm |
50nm to 50um |
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|
MSP450 |
400 to 1700 nm |
20nm to 50um |
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|
MSP500 |
250 to 1700 nm |
Up to 50um |
