| 型号 | Frequad-HP FQ50-20/-10 |
Frequad-M FQM-10/-07/-05/-03 |
Frequad-C FQC-50/-20 |
| 波长 | 266 nm | 266 nm | 266 nm |
| 输出功率 | 2.0/1.0 W | 1.0/0.7/0.5/0.3 W | 50/20 mW |
| 线宽 | < 0.005 pm | < 0.005 pm | < 0.005 pm |
| 功率稳定性 | < +/-1 %/8 hrs | < +/-1 %/8 hrs | < +/-3 %/8 hrs |
| 消光比 | > 100:1 | > 100:1 | > 100:1 |
| 光束质量 | TEM00, M2 < 1.2 | TEM00, M2 < 1.2 | TEM00, M2 < 1.3 |
| 偏振态 | Vertical, Linear | Vertical, Linear | Vertical, Linear |
| 光斑直径 | 3 mm ±0.3 mm | 3 mm ±0.3 mm | 0.8 mm ±0.2 mm |
| 发散角 (1/e2) | < 0.2 mrad | < 0.2 mrad | < 0.4 mrad |
| 供电要求 | AC 100-240V 50/60Hz |
AC 100-240V 50/60Hz |
AC 100-240V 50/60Hz |
| 功耗 | < 300 W | < 340 W | < 70 W |
| 制冷 | Air | Water | Air |
| 激光头尺寸 | 240 x 840 x 160 mm | 350 x 590 x 124 mm | 153 x 202 x 79 mm |
266nm,257.5nm连续紫外激光器
213nm/205nm深紫外激光器
266nm低噪音窄线宽激光器
266nm拉曼光谱激光器
266nm单频紫外激光器
266nm单纵模单频激光器
高功率266nm紫外激光器